MEMS Microphones - A Global Technology
Table of Contents
INTRODUCTION
STUDY GOALS AND OBJECTIVES
REASONS FOR DOING THE STUDY
CONTRIBUTIONS OF THE STUDY
SCOPE AND FORMAT
METHODOLOGY
INFORMATION SOURCES
AUDIENCES FOR THE STUDY
AUTHOR’S CREDENTIALS
EXECUTIVE SUMMARY
EXECUTIVE SUMMARY (CONTINUED)
SUMMARY TABLE A GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR MEMS MICROPHONES, 2006 AND 2011
SUMMARY FIGURE A GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011
SUMMARY TABLE B NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES, 2006 AND 2011
SUMMARY FIGURE B NORTH AMERICAN AND GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011
INDUSTRY OVERVIEW
BACKGROUND OF MEMS MICROPHONES
BACKGROUND OF MEMS MICROPHONES (CONTINUED)
MEMS MICROPHONE CHIP
MEMS ADVANTAGE
MEMES MICROPHONE APPLICATIONS AND MARKETS
MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS
MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS (CONTINUED)
MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS (CONTINUED)
MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS (CONTINUED)
TABLE 1 FORECAST FOR MEMS MICROPHONES IN MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS, 2006-2011
LAPTOPS
TABLE 2 MARKET FOR MEMS MICROPHONES IN LAPTOPS, 2005, 2006 AND 2011
AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS
AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS (CONTINUED)
AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS (CONTINUED)
AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS (CONTINUED)
TABLE 3 FORECAST FOR MEMS MICROPHONES IN AUTOMOTIVE HANDS-FREE
COMMUNICATION SYSTEMS
HEARING AIDS
HEARING AIDS (CONTINUED)
TABLE 4 FORECAST OF MEMS MICROPHONES IN HEARING AIDS 2006-2011
INDUSTRY STRUCTURE
INDUSTRY STRUCTURE (CONTINUED)
TABLE 5 SPECIFIC FOUNDRIES ASSOCIATED WITH MEMS MICROPHONE
MANUFACTURING CAPABILITIES IN 2006
INDUSTRY DYNAMICS AND GLOBAL MARKET
ONE-CHIP CMOS-MEMS TECHNOLOGY FOR MICROPHONES
ONE-CHIP CMOS-MEMS TECHNOLOGY FOR MICROPHONES (CONTINUED)
ONE-CHIP CMOS-MEMS TECHNOLOGY FOR MICROPHONES (CONTINUED)
FIGURE 1 SINGLE-CHIP DESIGN OF MEMS MICROPHONES
TWO-CHIP TECHNOLOGY FOR MICROPHONES
FIGURE 2 TWO-CHIP DESIGN OF MEMS-MICROPHONES
MARKET ACCORDING TO TECHNOLOGIES
TABLE 6 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY THROUGH 2011
FIGURE 3 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY, 2006 AND 2011
MARKET ACCORDING TO APPLICATIONS
TABLE 7 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION THROUGH 2011
FIGURE 4 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION, 2006 AND 2011
TECHNOLOGY OVERVIEW
AUDIO MICROPHONES
CONDENSER MICROPHONES
UNIDIRECTIONAL AND OMNI-DIRECTIONAL MICROPHONES
UNIDIRECTIONAL AND OMNI-DIRECTIONAL MICROPHONES (CONTINUED)
MEMS MICROPHONES
TABLE 8 FORMULAS USED TO DEFINE AUDIO QUALITY /CHARACTERSTICS OF MICROPHONES
TABLE 8 FORMULAS USED TO DEFINE AUDIO QUALITY /CHARACTERSTICS OF MICROPHONES (CONTINUED)
FABRICATION OF A MEMBRANE CHIP
TYPES OF MICROPHONES
CAPACITIVE MICROPHONES
PIEZO-RESISTIVE MICROPHONES
PIEZOELECTRIC MICROPHONES
OPTICAL MICROPHONES
FET MICROPHONES
TYPICAL FABRICATION PROCESS
FIGURE 5 PROCESSING STEPS FOR CMOS-MEMS MICROPHONES
FIGURE 6 LAYOUT OF SERPENTINE MESH DESIGN SHOWING TWO UNIT CELLS IN A MEMS MICROPHONE
TABLE 9 SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES
TABLE 9 SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES (CONTINUED)
TABLE 9 SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES (CONTINUED)
TABLE 9 SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES (CONTINUED)
TABLE 9 SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES (CONTINUED)
DRY ETCHING IN MEMS MICROPHONES
DRY ETCHING IN MEMS MICROPHONES (CONTINUED)
DRY ETCHING IN MEMS MICROPHONES (CONTINUED)
WET ETCHING IN MEMS MICROPHONES
WET ETCHING IN MEMS MICROPHONES (CONTINUED)
TABLE 10 EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES
TABLE 10 EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES (CONTINUED)
TABLE 10 EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES (CONTINUED)
MEMS AND INTEGRATED CIRCUIT FABRICATION PROCESSES COMPARED
MEMS AND INTEGRATED CIRCUIT FABRICATION PROCESSES COMPARED (CONTINUED)
MEMS AND INTEGRATED CIRCUIT FABRICATION PROCESSES COMPARED (CONTINUED)
PACKAGING
TABLE 11 EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES
TABLE 11 EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES (CONTINUED)
TABLE 11 EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES (CONTINUED)
LOW COST MEMS MICROPHONE MANUFACTURING ON THE PRINCIPLE OF IC CHIP MANUFACTURING
LOW COST MEMS MICROPHONE MANUFACTURING ON THE PRINCIPLE OF IC CHIP MANUFACTURING (CONTINUED)
TABLE 12 TECHNOLOGY LISTING OF MANUFACTURERS OF SURFACE MOUNTABLE,
CHIP-SIZE PACKAGE MEMS MICROPHONES
TABLE 13 TYPICAL SIZES OF COMMERCIALLY AVAILABLE MEMS MICROPHONES IN 2006
DESCRIPTION OF ELECTRONIC CHIP INTEGRATED IN MEMS
MICROPHONES
TABLE 14 KEY TERMINOLOGIES USED TO DEFINE TYPES OF ELECTRONIC CIRCUITS
INTEGRATED IN MEMS MICROPHONES
MEMS MICROPHONE CONSTRUCTION
DIAPHRAGM
AIR GAP
CHARACTERISTICS OF MEMS MICROPHONES
CURRENT MATERIALS USED IN MEMS MICROPHONES
FABRICATION TECHNIQUES
SURFACE ACTIVITY
INDUSTRY STRUCTURE AND MARKETS
COMPETITIVE INNOVATION TRENDS
TABLE 15 COMPANY PRODUCT REFERENCE FOR MEMS MICROPHONES
TABLE 16 PERCENTAGE SHARE OF WORLD MARKET OF TOP FIVE COMPANIES MANUFACTURING MEMS MICROPHONES IN 2006
PARTNERSHIP AND CONSOLIDATION
TABLE 17 ACQUISITIONS AND COLLABORATIONS AMONG MANUFACTURERS OF MEMS MICROPHONES FROM 2000 TO 2006
REGIONAL MARKET
TABLE 18 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY REGION THROUGH 2011
FIGURE 7 REGIONAL PERCENTAGES OF MARKET SHARE FOR MEMS MICROPHONES IN 2006 AND 2011
PATENTS AND PATENT ANALYSIS
LIST OF PATENTS
SILICON-BASED TRANSDUCER FOR USE IN HEARING INSTRUMENTS AND LISTENING DEVICES
MEMS BASED ACOUSTIC ARRAY
SILICON MICROPHONE
HIGH-ORDER DIRECTIONAL MICROPHONE DIAPHRAGM
ULTRATHIN FORM FACTOR MEMS MICROPHONES AND MICROSPEAKERS
FLEXIBLE MEMS TRANSDUCER AND MANUFACTURING METHOD THEREOF, AND FLEXIBLE MEMS WIRELESS MICROPHONE
SMT-TYPE STRUCTURE OF THE SILICON-BASED ELECTRET CONDENSER MICROPHONE
METHOD OF PROVIDING A HYDROPHOBIC LAYER AND A CONDENSER MICROPHONE HAVING SUCH A LAYER
PROCESS OF MAKING AN ALL-SILICON MICROPHONE
METHOD FOR PRODUCING A FILLED RECESS IN A MATERIAL LAYER, AND AN INTEGRATED CIRCUIT CONFIGURATION PRODUCED BY THE METHOD
HIGH PERFORMANCE SILICON CONDENSER MICROPHONE WITH PERFORATED SINGLE-CRYSTAL SILICON BACKPLATE
IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE
METHOD OF MANUFACTURING A SEMICONDUCTOR
COMPONENT HAVING A FIXED ELECTRODE BETWEEN TWO FLEXIBLE DIAPHRAGMS
IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE
PATENT ANALYSIS ACCORDING TO COMPANIES
TABLE 19 NUMBER OF U.S. PATENTS GRANTED TO COMPANIES MANUFACTURING MEMS MICROPHONES FROM 2002 THROUGH 2006 (UPTO DEC 31)
FIGURE 8 ILLUSTRATIONS OF US PATENTS ISSUED TO COMPANIES IN MEMS MICROPHONES FROM JANUARY 2002 AND DECEMBER 2006
PATENT ANALYSIS ACCORDING TO REGIONS
TABLE 20 NUMBER OF U.S. PATENTS GRANTED BY ASSIGNED COUNTRY/REGION FOR MEMS MICROPHONES FROM JAN. 2002 TO 2006
FIGURE 9 U.S. PATENTS GRANTED FOR MEMS MICROPHONES BY REGION FROM 2002 THROUGH 2006
COMPANY PROFILES
AKUSTICA, INC
AKUSTICA, INC. (CONTINUED)
CARNEGIE MELLON UNIVERSITY
CARNEGIE MELLON UNIVERSITY (CONTINUED)
DELEPHI TECHNOLOGIES, INC.
INFINEON TECHNOLOGIES AG
INSTITUTE OF MICROELECTRONICS
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (ITRI)
JL WOLRD.
KNOWLES ACOUSTICS
MEMES TECHNOLOGY BHD
MEMES TECHNOLOGY BHD (CONTINUED)
MOTOROLA, INC.
NATIONAL SEMICONDUCTOR
SAMSUNG ELECTRONICS CO. LTD.
SONION A/S
SONION A/S (CONTINUED)
SYMPHONIX DEVICES, INC./MED-EL.
THE RESEARCH FOUNDATION OF THE STATE UNIVERSITY OF NEW YORK
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC ,
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